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K1000 Mass Flow Controller
K1000 is a high-precision and high stability thermal mass flow controller. Its range is from 10sccm to 1000sccm. K1000A is a low flow range MFC (from
Product details
advantage
The sensor part is made of Hastelloy alloy, which has strong corrosion resistance.
High product accuracy, up to 100%~25%: ± 1.0% of S.P., 25%~2%: ± 0.25% F.S. Fast response time (≤ 1s)
The product has multi gas and multi range functions, which can change the setting of gas types and flow rates
• Supports high traffic (up to 1000L) digital mode communication mode
The product has passed CE and RoHS certification
technical parameter
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Model number |
K1000A |
K1000B |
K1000C |
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Flow specification (N2 converted flow) |
Bin 1: 10 SCCM ~30SCCM |
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Bin 2: 30 SCCM~100 SCCM |
Bin 6: 3SLM ~10SLM |
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60SLM 、100SLM、 |
200SLM、300SLM、 |
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Bin 3: 100SCCM~300SCCM |
Bin 7: 10SLM~ 30SLM |
Bin 8: 30 SLM ~50SLM |
150SLM、200SLM |
400SLM、500SLM |
600SLM, 1000SLM (N2, H2, Air, etc.) |
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Bin 4: 300 SCCM ~1SLM |
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Bin 5: 1SLM ~3SLM |
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Valve type |
N/O: normally open, N/C: normally closed |
N/C: normally closed type |
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Flow control range |
2%～100%F.S. |
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accuracy |
100%～25%：±1.0% of S.P.， |
± 1% F.S. (accuracy guarantee range 15-35 ℃) |
± 2% F.S. (accuracy guarantee range 15-35 ℃) |
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Working environment temperature |
5～50℃ |
5～45℃ |
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Response time |
≦1sec |
≦3sec |
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linear |
±0.5%F.S. |
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repeatability |
±0.2%F.S. |
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Range of working pressure difference |
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N/O100-300KPa (3SLM~10SLM) |
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50-300KPa |
N/O150-300KPa (11SLM~30SLM) |
200～300KPa |
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(Ar: 100-300KPa) |
N/C100-300KPa (3SLM~30SLM) |
（Ar: 250～450KPa） |
100-300KPa |
150-300KPa |
300～450kPa (H2：150～300kPa) |
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（Ar 200～3500KPa） |
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Temperature coefficient |
Zero:±0.1%F.S./℃ Span: ±0.1%F.S./℃ |
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Maximum working pressure |
400KPa（Ar:500KPa） |
700KPa |
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Voltage resistance |
1MPa |
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Leakage rate |
Metal seal: 1 × 10－11Pa・m3/sec He (1×10－10atm・cc/sec He) |
Rubber ring seal: 1 × 10-7Pa・m3/sec He (1×10－6atm・cc/sec He) |
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Rubber ring seal: 1 × 10－7Pa・m3/sec He (1×10－6atm・cc/sec He) |
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Sealing material |
Metal sealing; Fluororubber; chloroprene rubber |
Fluororubber; chloroprene rubber |
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Communication form |
Simulation: 0~5V DC Digital: RS485, DeviceNet, EtherCAT |
Simulation: 0~5V DC Digital: RS485, DeviceNet |
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power supply |
Analog/Digital:+15VDC 50mA, -15VDC 200mA; DeviceNet：+11~+24VDC，5.5VA(5.5W) |
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Standard joint form |
VCR 1/4 male connector, double sleeve 1/4 male connector, 1.5 '' W-Seal, 1.125 '' W-Seal, 1.125 '' C-Seal |
VCR 3/8 male connector, double card sleeve 3/8 male connector |
VCR 1/2 male connector, double card sleeve 1/2 male connector |
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weight |
1.0kg |
3.0kg |
3.7kg |
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